Sweeping the lean angle can enhance film thickness uniformity and sidewall coverage whilst also staying away from higher Strength-reflected neutral species for essential processes.
In-situ optical monitoring and Manage is obtainable as a result of Angstrom’s optical checking & Handle bundle.
An optional cryogenic pump enhances foundation force and pumping speed and may be isolated from the chamber all through reactive processes with oxygen.
The dimensions, placement, and equipment ratio of each and every World are optimized to deliver the absolute best achievable film thickness uniformity.
Our Reticle® ion beam sputter deposition programs are designed and engineered to create precise optical movies of the very best purity, density, and security.
Variable angle stages allow for extremely strong thin movie tactics. Even so, considered one of its largest troubles is reproducibility. The substrate is commonly set at an exceptionally oblique angle in relation towards the supply, as well as the movies are very delicate on the precision of the angle.
Angstrom Engineering® designs and engineers Just about every Reticle® System to deliver our partners in the optics community the chance to build the films they need with exceptional purity, density, and uniformity, all in a very repeatable and automatic trend.
Our exclusive style and design permits direct or indirect monitoring with the variable angle phase, getting rid of the necessity for tooling aspects or even a witness glass changer. Find out more with regards to the Optical Monitoring & Management deal below.
As well as sample rotation, the variable angle phase that is utilized for Reticle® offers for in-constructed angular motion throughout the deposition flux.
All standard Reticle® platforms contain yet another gridless conclusion-Hall ion source with hollow cathode neutralizer.
one diploma. People incredibly slender tolerances let us to frequently create quite exact nanostructures. I can say wholeheartedly the product and repair Angstrom Engineering® shipped has been astounding.
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Angstrom Engineering’s Reticle® methods offer a switch-key Remedy for the people seeking to recognize any optical style and design into a significant-general performance movie.
Dynamic uniformity shaping is realized employing a flux correction protect between the deposition resource and the substrate.
Every axis of motion is managed by way of Aeres® working with precision servo motors, giving better than 0.one degrees of positional accuracy. Tungsten materials for electronics Front side infrared heating bulbs tilt While using the stage to offer a dependable temperature profile for reactive processes.